Why is the AF plasma spraying coating machine the soul of high-precision coating for semiconductor devices!

As is well known, plasma spray coating machines not only have wear-resistant and anti fingerprint effects in the glass field, but are also widely used in the semiconductor field to play the following roles. Today, let's explore this mysterious journey together.

Due to the precise requirements of semiconductors for thin films, plasma spraying coating technology is needed to achieve high-precision thin film deposition. 

Generally, the uniformity of film thickness needs to be controlled within a very small range, usually reaching ± 1% or even higher accuracy. This is crucial for the consistency of semiconductor device performance. The seismometer AF dual nozzle dual plasma spray gun plasma spraying coating equipment can accurately control the thickness and composition of the coating, 

meeting the precise requirements of different functional thin films in semiconductor manufacturing. 

For example, in chip manufacturing, it can accurately deposit insulation or conductive layers with a thickness of only a few nanometers.

Secondly, the high-temperature plasma generated by plasma spraying can fully melt and ionize the coating material, impact the semiconductor surface at extremely high speeds, and form a thin film with a dense microstructure and low porosity, which can effectively block the invasion of external impurities and improve the stability and reliability of semiconductor devices.

Finally, there is a strong bonding force between the thin film and the semiconductor substrate, which is due to the high-energy effect of plasma that causes physical and chemical bonding between the thin film material and the substrate surface, making it less prone to problems such as thin film detachment. This ensures that the thin film can maintain good performance in complex semiconductor manufacturing processes and long-term use.

Compared with some traditional high-temperature coating methods, 

the AF plasma spraying coating machine has a relatively small thermal impact on the semiconductor substrate during the coating process. It can avoid excessive substrate temperature by precisely controlling the energy and spraying parameters of the plasma, thereby reducing thermal damage to semiconductor material properties and device structures.

In addition to the above, the daily maintenance methods of plasma spray coating machines are also particularly important. The following is an analysis of the maintenance methods of AF plasma spray coating machines. Purchasing a device is an obvious manufacturing cost for a company, so it is very important to maintain the equipment regularly. Here are some maintenance methods for plasma spray coating machines:

1. Fan maintenance: Manually disassemble the fan inlet and outlet every six months to check for debris and dust removal, in order to prevent fan blockage.

2. Spray gun shaft maintenance: Wipe the spray gun drive shaft with an air gun or alcohol every six months to prevent the motor shaft from deviating and causing malfunctions.

3. Pressure tank maintenance: Regularly clean the pressure tank, replace the filter screen, and prevent clogging of the spray gun.

4. Spray gun maintenance: When each air pressure is normal and the air source is clean, clean and maintain the spray gun. When the flow is unstable and intermittent, it indicates that the spray gun has been blocked, and the specific severity depends on the actual situation. Therefore, regular maintenance of the spray gun is particularly important before this.

In general, the main sources of dirt on spray guns are air sources, chemicals, and pressure tanks, which can cause blockages in the spray gun, usually through air caps and nozzles. Among them, the blockage of the air cap is caused by air source dirt, and the blockage of the nozzle is caused by impurities in the medicine and pressure tank.

The maintenance method and process of the vibration instrument AF plasma spray gun are as follows:

1. Clean the stainless steel part of the removed gun needle with solvent, and clean and add moisturizing oil to the back of the gun needle;

2. The disassembled nozzle, air cap, and air cap locking ring should be soaked and cleaned with solvent in a short period of time;

3. Dismantle the emergency sealing ring of the gun needle at the front of the gun body and thoroughly clean the solvent inside and on the surface of the gun body;

4. The interior and surface of the disassembled rear gun body are thoroughly cleaned with solvent;

5. Thoroughly clean the disassembled rear gun body piston and piston with lubricating oil, and add new lubricating oil.

The above is about the application and daily maintenance methods of plasma spray coating machines in the semiconductor field. If you want to learn more and consult, please feel free to contact our engineers to help you answer your questions.